Mechanism of Carbon and Oxygen Incorporation in Silicon Single Crystals Grown by the Czochralski (Cz) Technique
- 1 April 1992
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 139 (4) , 1207-1212
- https://doi.org/10.1149/1.2069368
Abstract
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