Fabrication of Planar and Cross-Sectional TEM Specimens Using a Focused Ion Beam
- 1 January 1990
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Formation of silicon-on-insulator layers by electron beam recrystallizationMicroelectronic Engineering, 1988
- Channelling ion image contrast and sputtering in gold specimens observed in a high-resolution scanning ion microscopeJournal of Materials Science Letters, 1988
- Pressure and irradiation angle dependence of maskless ion beam assisted etching of GaAs and SiJournal of Vacuum Science & Technology B, 1985