Design and synthesis of thermally labile polymers for microelectronics: poly(vinyl tert-butyl carbonate sulfone)
- 1 June 1991
- journal article
- Published by American Chemical Society (ACS) in Macromolecules
- Vol. 24 (12) , 3528-3532
- https://doi.org/10.1021/ma00012a010
Abstract
No abstract availableThis publication has 0 references indexed in Scilit: