Localized and directed lateral growth of carbon nanotubes from a porous template
- 1 November 2002
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 20 (6) , 2745-2748
- https://doi.org/10.1116/1.1523019
Abstract
We report on the growth of laterally oriented carbon nanotubes with both positional and directional control. The growth was done by chemical vapor deposition from Fe/Mo catalyst embedded inside a porous silicon medium which was formed electrochemically on the vertical faces of etched posts on a silicon substrate. A solution containing the catalyst was allowed to diffuse into the porous medium only in lithographically defined areas. Nanotubes grew only in the patterned areas with a preferred orientation normal to the edges of the etched posts.Keywords
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