Enhanced Interdiffusion in the Al–Si System during Ar Ion Bombardment

• 1 September 1979
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 18  (9) , 1869-1870
• https://doi.org/10.1143/jjap.18.1869

Abstract

Keywords

• SYSTEM DURING AR
• ENHANCED INTERDIFFUSION
• AR ION
• SI SYSTEM
• ION BOMBARDMENT