CVD in Hot Wall Reactors—The Interaction Between Homogeneous Gas-Phase and Heterogeneous Surface Reactions
- 1 July 1998
- journal article
- Published by Wiley in Chemical Vapor Deposition
- Vol. 04 (04) , 151-158
- https://doi.org/10.1002/(sici)1521-3862(199807)04:04<151::aid-cvde151>3.0.co;2-2
Abstract
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