Abstract: Focused ion beam designs for sputter deposition

• 1 March 1979
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 16  (2) , 179-180
• https://doi.org/10.1116/1.569900

Abstract

Keywords

• SPUTTER DEPOSITION
• FOCUSED ION
• BEAM DESIGNS
• ION BEAM
• ABSTRACT