Electrostatic micromechanic actuators

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Abstract
Actuators based on the electrostatic principle are one of the most important in microsystem technology. In the future, actuators of 1D or 2D type will be necessary in many fields, especially in optical deflection and scanning systems. They will solve many different problems: device fabrication processes, surface-deformation, reflection factors, optimization of movement, electrical drive and reliability. Micromechanic electrostatic torsional mirrors are described showing swivel angles up to 30 degrees .

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