Focusing grating coupler in AlGaAs optical waveguide
- 1 August 1992
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 4 (8) , 903-905
- https://doi.org/10.1109/68.149903
Abstract
A focusing grating coupler (FGC) for focusing a guided wave into a spot in free space was fabricated in a III-V semiconductor waveguide for the first time. A FGC of 0.83-mm focal length and 0.5-mm*0.5-mm aperture for an AlGaAs waveguide and 0.83- mu m wavelength was designed and fabricated by electron-beam writing and reactive ion etching. Nearly diffraction-limited focus spot size of 2 mu m and a coupling efficiency of 20% were obtained.Keywords
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