Repair of opaque X-ray mask defects: Application and resolution

• 1 March 1991
• journal article
• Published by Elsevier in Microelectronic Engineering
• Vol. 13  (1) , 275-278
• https://doi.org/10.1016/0167-9317(91)90092-r

Abstract

Keywords

• RAY MASK
• OPAQUE X
• MASK DEFECTS
• RESOLUTION
• REPAIR OF OPAQUE