Polycrystalline diamond pressure microsensor
- 1 January 1996
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 5 (1) , 86-92
- https://doi.org/10.1016/0925-9635(96)80010-0
Abstract
No abstract availableKeywords
This publication has 14 references indexed in Scilit:
- Piezoresistivity in vapor-deposited diamond filmsApplied Physics Letters, 1992
- Characterization of semiconducting diamond film and its application to electronic devicesThin Solid Films, 1991
- On the Control of Diamond Deposition Structure and MorphologyJournal of the Electrochemical Society, 1991
- Material and electrical characterization of polycrystalline boron-doped diamond films grown by microwave plasma chemical vapor depositionJournal of Applied Physics, 1991
- Piezoresistance in polysilicon and its applications to strain gaugesSolid-State Electronics, 1989
- Polycrystalline silicon strain sensorsSensors and Actuators, 1985
- Piezoresistive properties of polycrystalline siliconJournal of Applied Physics, 1976
- Hall Mobility in Chemically Deposited Polycrystalline SiliconJournal of Applied Physics, 1971
- The nature of the acceptor centre in semiconducting diamondJournal of Physics C: Solid State Physics, 1971
- Piezoresistance Effect in Germanium and SiliconPhysical Review B, 1954