Backscattering and ESR Studies in Heavily Damaged Layer

Publisher Website

1 January 1975

book chapter
Published by Springer Nature

p. 473-483
https://doi.org/10.1007/978-1-4684-2151-4_60

Abstract

No abstract available

Keywords

This publication has 1 reference indexed in Scilit:

Ion implantation of silicon and germanium at room temperature. Analysis by means of 1.0-MeV helium ion scattering
Canadian Journal of Physics, 1968