Fluid simulations of radio frequency glow discharges: Two-dimensional argon discharge including metastables
- 1 November 1993
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 63 (18) , 2478-2480
- https://doi.org/10.1063/1.110454
Abstract
Two‐dimensional self‐consistent fluid simulations of a 13.56 MHz argon glow discharge including metastable species were performed as examples of a coupled glow‐discharge/neutral‐transport‐and‐reaction system. The electron density was found to peak in the radial direction. The metastable density profiles showed ‘‘hot spots’’ in both axial and radial directions.Keywords
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