Electronic transport in thermally crystallized SiC films on sapphire
- 1 January 1995
- journal article
- Published by Elsevier in Materials Science and Engineering: B
- Vol. 29 (1-3) , 147-150
- https://doi.org/10.1016/0921-5107(94)04026-z
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- SiC for sensors and high-temperature electronicsSensors and Actuators A: Physical, 1994
- Crystalline-amorphous contrast formation in thermally crystallized SiCJournal of Non-Crystalline Solids, 1991
- Production of large-area single-crystal wafers of cubic SiC for semiconductor devicesApplied Physics Letters, 1983