Mass spectrometric study of gas evolution from plasma-deposited fluorohydrogenated amorphous carbon films on heating
- 1 December 1988
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 167 (1) , 255-260
- https://doi.org/10.1016/0040-6090(88)90502-0
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Thermal gas effusion from hydrogenated amorphous carbon filmsApplied Physics Letters, 1987
- Amorphous carbon coatings prepared by high rate rf plasma deposition from fluorinated benzenesApplied Physics Letters, 1985
- rf-plasma deposited amorphous hydrogenated hard carbon thin films: Preparation, properties, and applicationsJournal of Applied Physics, 1983
- Mass spectra of fluorocarbonsJournal of Research of the National Bureau of Standards, 1952