Axial dependence of the electron energy distribution function in microwave discharges sustained by propagating surface waves
- 1 November 1994
- journal article
- Published by IOP Publishing in Physica Scripta
- Vol. 50 (5) , 532-539
- https://doi.org/10.1088/0031-8949/50/5/013
Abstract
No abstract availableKeywords
This publication has 28 references indexed in Scilit:
- Analytical expressions for the axial structure of surface wave sustained plasmas under various regimes of charged particle lossPlasma Sources Science and Technology, 1993
- Photoemission optogalvanic effect studies in N2, NO2and Ar discharges under pulsed laser excitationJournal of Physics D: Applied Physics, 1993
- High energy electron generation in surface-wave-produced plasmasPlasma Sources Science and Technology, 1992
- Self-consistent modeling of surface wave produced discharges at low pressuresJournal of Applied Physics, 1991
- Plasma sources based on the propagation of electromagnetic surface wavesJournal of Physics D: Applied Physics, 1991
- Slow ionising high-frequency electromagnetic wave along a thin plasma columnJournal of Physics D: Applied Physics, 1984
- Conditions of existence and axial structure of long microwave discharges sustained by travelling wavesJournal of Physics D: Applied Physics, 1983
- Theory of a plasma column sustained by a surface waveJournal of Physics D: Applied Physics, 1981
- Axial electron density and wave power distributions along a plasma column sustained by the propagation of a surface microwaveJournal of Applied Physics, 1980
- Asymmetrical Triple Probe Method for Determining Energy Distribution of Electron in PlasmaJournal of Applied Physics, 1960