Crystal Orientation and Piezoelectricity of AIN Thin Films Prepared on Polycrystalline Substrates
- 1 January 1995
- journal article
- Published by Ceramic Society of Japan in Journal of the Ceramic Society of Japan
- Vol. 103 (1202) , 1093-1096
- https://doi.org/10.2109/jcersj.103.1093
Abstract
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