A New Cold Sputtering System Using a Trapping Electrode

• 1 January 1974
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 13  (S1) , 253
• https://doi.org/10.7567/jjaps.2s1.253

Abstract

Keywords

• NEW COLD
• COLD SPUTTERING
• TRAPPING ELECTRODE
• SPUTTERING SYSTEM
• SYSTEM USING