A study of impurity mobility in ion-implanted Al by Rutherford backscattering
- 1 December 1983
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research
- Vol. 218 (1-3) , 537-541
- https://doi.org/10.1016/0167-5087(83)91037-2
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
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