A compact CMA spectrometer with axially integrated hybrid electron-ion gun for ISS, AES and sputter depth profile analysis
- 1 October 1986
- Vol. 36 (10) , 715-722
- https://doi.org/10.1016/0042-207x(86)90348-9
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- The structural design and the electron optics of a hybrid electron-ion gunJournal of Physics E: Scientific Instruments, 1984