Molecular Routes to Metal−Carbides, −Nitrides, and −Oxides. 3.1 Chemical Vapor Deposition Employing X3W⋮*CCMe3, Where X = CH2CMe3, OtBu, and OtBu-d9 and *C = 12C or 13C, and a Comparison with the Chemistry of (tBuO)3W⋮N
- 15 August 1998
- journal article
- research article
- Published by American Chemical Society (ACS) in Chemistry of Materials
- Vol. 10 (9) , 2365-2370
- https://doi.org/10.1021/cm970675+
Abstract
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