Evaluation of energy dissipation mechanisms in vibrational microactuators
- 17 December 2002
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
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- Viscous energy dissipation in laterally oscillating planar microstructures: a theoretical and experimental studyPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometryJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1992
- A bending and stretching mode crystal oscillator as a friction vacuum gaugeVacuum, 1984