Deformation-free overgrowth of InGaAsP DFB corrugations
- 20 January 1983
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 19 (2) , 34-36
- https://doi.org/10.1049/el:19830026
Abstract
A hybrid LPE/MOCVD growth procedure is described which enables λ = 1.55 μm distributed feedback laser structures to be fabricated without deformation of the corrugated region of the device. Depths of corrugations remaining after overgrowth using this process are typically 1600 Å. Conditions under which deformation does occur are also presented.Keywords
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