Diamond abrasion properties of plasma-deposited silicon oxide films
- 15 October 1986
- Vol. 112 (1) , 29-37
- https://doi.org/10.1016/0043-1648(86)90198-5
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Room temperature glow discharge deposition of silicon oxides from SiH4 and N2OJournal of Vacuum Science & Technology A, 1984
- Chemical Identification of Surface GroupsPublished by Elsevier ,1966