On the energy distribution and angular distribution of sputtered particles
- 1 January 1980
- journal article
- research article
- Published by Taylor & Francis in Radiation Effects
- Vol. 52 (3-4) , 137-143
- https://doi.org/10.1080/00337578008210025
Abstract
The influence of the anisotropy of the momentum recoil density of collision cascades in solids on the energy and angular distribution of sputtered particles is considered. Various sputtering mechanisms are discussed. For some of those mechanisms this anisotropy leads to deviations from a ε−2 asymptotic form in the energy distribution and to an asymmetry in the angular distribution as a function of the angle of incidence of the projectile.Keywords
This publication has 11 references indexed in Scilit:
- Sputtering—a review of some recent experimental and theoretical aspectsApplied Physics A, 1975
- Momentum deposition by heavy-ion bombardment and an application to sputteringJournal of Physics D: Applied Physics, 1975
- On the distribution of recoil momenta in a collision cascadeRadiation Effects, 1975
- Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline TargetsPhysical Review B, 1969
- II. The energy spectrum of ejected atoms during the high energy sputtering of goldPhilosophical Magazine, 1968
- The influence of the scattering law on the radiation damage displacement cascade. IIPhilosophical Magazine, 1968
- On recoil numbers in crystalline structuresPhysica, 1966
- The energy spectra of atoms slowing down in structureless mediaPhilosophical Magazine, 1965
- The Displacement of Atoms in Solids by RadiationReports on Progress in Physics, 1955
- Classical MechanicsPhysics Today, 1952