A Spectroscopic Investigation of the Amorphous to Microcrystalline Transition in Silicon Prepared by Reactive Magnetron Sputtering
- 1 January 1993
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Infrared spectroscopic study of SiOx films produced by plasma enhanced chemical vapor depositionJournal of Vacuum Science & Technology A, 1986
- Structural interpretation of the vibrational spectra of-Si: H alloysPhysical Review B, 1979