Design, fabrication, and polarization of soft x-ray transmission multilayers
- 20 October 1992
- proceedings article
- Published by SPIE-Intl Soc Optical Eng
- p. 395-401
- https://doi.org/10.1117/12.132147
Abstract
Soft-x-ray transmission multilayers have been designed and fabricated for use as polarizing elements. Polarization performance of the multilayers has been studied at a photon energy of 97 eV by rotating analyzer ellipsometry with a multilayer reflection polarizer. The transmission multilayers were found to be a good polarizer of 99.2% polarizance and a phase shifter of 90 degree(s) retardation with equal transmission ratio (5:3) and high throughput around 10%.Keywords
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