Silicon three-axial tactile sensor
- 1 June 1996
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 54 (1-3) , 505-510
- https://doi.org/10.1016/s0924-4247(95)01190-0
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- A flexible polyimide-based package for silicon sensorsSensors and Actuators A: Physical, 1994
- A high-performance silicon tactile imager based on a capacitive cellIEEE Transactions on Electron Devices, 1985