Vacuum gauging with complementary metal–oxide–semiconductor microsensors
- 1 May 1995
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 13 (3) , 503-508
- https://doi.org/10.1116/1.579774
Abstract
We report different types of vacuum microsensors (size 6 Pa are demonstrated. The sensor responses are modeled using kinetic gas theory, with the conclusion that a typical dissipation length defined by the device geometry determines the useful pressure range.Keywords
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