On the stages of chlorination operational in laser etch patterning of copper films
- 30 September 1989
- journal article
- Published by Elsevier in Materials Science and Engineering: B
- Vol. 3 (4) , 335-342
- https://doi.org/10.1016/0921-5107(89)90137-2
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Laser-assisted chemical etching of copperApplied Physics Letters, 1988
- The interaction of chlorine with copper: II. Bulk diffusionSurface Science, 1986
- The interaction of chlorine with copperSurface Science, 1986
- The etching of Cu(100) with Cl2Journal of Vacuum Science & Technology A, 1985