Ion-beam mixing and thermal annealing of Al–Nb and Al–Ta thin films
- 1 December 1988
- journal article
- Published by Springer Nature in Journal of Materials Research
- Vol. 3 (6) , 1082-1088
- https://doi.org/10.1557/jmr.1988.1082
Abstract
Ion-beam mixing and thermal annealing of thin, alternating layers of Al and Nb, as well as Al and Ta, were investigated by selected area diffraction and Rutherford backscattcring. The individual layer thicknesses were adjusted to obtain the overall compositions as Al3Nb and Al3Ta. The films were ion mixed with 1 MeV Au+ ions at a dose of 1 × 1016 ions cm−2. Uniform mixing and amorphization were achieved for both Al−Nb and Al−Ta systems. Equilibrium crystalline A13Nb and Al13Ta phases were formed after annealing of ion mixed amorphous films at 400 °C for 1 h. Unmixed films, however, remained unreacted at 400 °C for 1 h. Partial reaction was observed in the unmixed film of Al–Nb at 400 °C for 6 h. After annealing at 500 °C for 1 h, a complete reaction and formation of Al3Nb and Al3Ta phases in the respective films were observed. The influence of thermodynamics on the phase formation by ion mixing and thermal annealing is discussed.Keywords
This publication has 9 references indexed in Scilit:
- Corrosion Behavior of Ion Beam Mixed Amorphous NiNb CoatingJournal of the Electrochemical Society, 1987
- Sputter-deposited and ion-mixed NiTi and NiCr thin filmsMaterials Science and Engineering, 1987
- When is thermodynamics relevant to ion-induced atomic rearrangements in metals?Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
- Amorphous film formation by ion mixing in binary metal systemsNuclear Instruments and Methods in Physics Research, 1983
- Ion-induced amorphous and crystalline phase formation in Al/Ni, Al/Pd, and Al/Pt thin filmsApplied Physics Letters, 1983
- Microalloying by ion-beam mixingNuclear Instruments and Methods, 1981
- Ion-beam-induced reactions in metal-semiconductor and metal-metal thin film structuresNuclear Instruments and Methods, 1981
- A New metallurgical investigation of the niobium-aluminium systemJournal of the Less Common Metals, 1980
- Coupled phase diagrams and thermochemical data for transition metal binary systems — VCalphad, 1978