Electron Spin Resonance Studies on Ion-Implanted Silicon. I. Amorphisation

• 1 August 1973
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 12  (8) , 1181-1189
• https://doi.org/10.1143/jjap.12.1181

Abstract

Keywords

• ION IMPLANTATION
• ELECTRON SPIN RESONANCE