Properties of a-Si:H and a-SiGe:H Films Deposited by Photo-Assisted CVD
- 1 January 1986
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Structural, electrical, and optical properties of a-:H and an inferred electronic band structurePhysical Review B, 1985
- High photoconductivity in dual magnetron sputtered amorphous hydrogenated silicon and germanium alloy filmsApplied Physics Letters, 1984