Practical Langmuir probe measurements in deposition plasmas

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Abstract
The use of Langmuir probes in deposition plasmas is briefly reviewed. Electron temperature and plasma density of different depositing plasmas were measured as functions of power, pressure, and flow by double floating cylindrical-type electrostatic probes and calculated using Laframboise’s theory (J. G. Laframboise, University of Toronto Institute for Aerospace Studies Report No. 100, 1966). A description of the cylindrical double-floating probes and the electrical configuration is given. The probes are a useful tool for characterizing sputtering and polymer-forming plasmas.

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