X-ray photoelectron spectroscopy studies of modified surfaces of α-Al2O3, SiO2, and Si3N4 by low energy reactive ion beam irradiation
- 1 November 1999
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 17 (6) , 3362-3367
- https://doi.org/10.1116/1.582067
Abstract
No abstract availableKeywords
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