Growth and Electrical Characterization of the Lightly-Doped Thick 4H-SiC Epilayers
- 1 April 2002
- journal article
- Published by Trans Tech Publications, Ltd. in Materials Science Forum
- Vol. 389-393, 171-174
- https://doi.org/10.4028/www.scientific.net/msf.389-393.171
Abstract
No abstract availableKeywords
This publication has 0 references indexed in Scilit: