An elastic cross section model for use with Monte Carlo simulations of low energy electron scattering from high atomic number targets
- 1 November 1991
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 9 (6) , 3578-3581
- https://doi.org/10.1116/1.585848
Abstract
No abstract availableThis publication has 0 references indexed in Scilit: