Low-Temperature Growth Process of Polycrystalline Silicon for Thin Film Transistors.

• 1 January 1994
• journal article
• Published by The Vacuum Society of Japan in SHINKU
• Vol. 37  (11) , 875-880
• https://doi.org/10.3131/jvsj.37.875

Abstract

Keywords

• THIN FILM TRANSISTORS
• POLYCRYSTALLINE SILICON
• LOW TEMPERATURE
• TEMPERATURE GROWTH