Hydrogen-free amorphous carbon films approaching diamond prepared by magnetron sputtering
- 8 July 1996
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 69 (2) , 158-160
- https://doi.org/10.1063/1.116906
Abstract
Unhydrogenated amorphous carbon films were deposited by rf magnetron sputtering at room temperature. In situ spectroscopic ellipsometry and real time ellipsometry were used to monitor and characterize the films during deposition as well as to define the region of the preparation conditions where carbon films rich in sp3 C–C bonds are deposited. Evidence that the amorphous films exhibit the diamond character as well as their metastability were also provided and discussed by Raman spectroscopy and other techniques.Keywords
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