Influence of higher deposition temperature on a-Si:H material properties, powder formation and light-induced degradation, using the VHF (70 MHz) glow discharge technique
- 1 December 1993
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 164-166, 59-62
- https://doi.org/10.1016/0022-3093(93)90491-f
Abstract
No abstract availableKeywords
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