Progress in the Atomic-Scale Analysis of Materials with the Three-Dimensional Atom Probe

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Abstract
Exactly 50 years ago, E.W. Müller became the first person to observe single atoms, with the aid of the field-ion microscope (FIM). In 1967, with John Panitz and S. Brooks McLane, Müller's invention of the atom probe meant that, in his words, “We can now really deal much more intimately with the individual atoms which we encounter, since we know their names.” By combining position-sensitive detection with the time-of-flight mass spectrometry of single atoms in the atom probe, Cerezo and co-workers in the late 1980s built an instrument capable of reconstructing the three-dimensional (3D) atomic distribution of elements present in a material. The instruments that are capable of microanalysis at this level, called generically 3D atom probes (3DAPs), were the subject of two articles published in MRS Bulletin in 1994. In this article, we review some of the progress in the field since that time, in particular, the expansion of the range of materials problems that can be addressed by this powerful technique.