Theoretical and Experimental Investigations of Chlorine RF Glow Discharges: II . Experimental

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Abstract
Key plasma properties of a 13.56 MHz chlorine glow discharge were measured using several plasma diagnostic techniques. Electron density and energy, self‐sustained electric field, RF current flowing through the plasma, ion bombardment energy, and atomic chlorine concentration were measured as a function of reactor operating conditions. The experimental data were compared to the predictions of a plasma reactor model which included details of the bulk plasma. Good agreement between the measured and predicted values of all the above plasma properties was obtained over a range of pressure, power, and electrode spacing without adjusting any reaction rate coefficients.

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