Neutral radical detection in silane glow-discharge plasma using coherent anti-stokes raman spectroscopy
- 1 December 1983
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 59-60, 667-670
- https://doi.org/10.1016/0022-3093(83)90259-4
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Detection of Neutral Species in Silane Plasma Using Coherent Anti-Stokes Raman SpectroscopyJapanese Journal of Applied Physics, 1983
- High resolution absorption and emission spectroscopy of a silane plasma in the 1800–2300 cm−1 rangeThe Journal of Chemical Physics, 1982
- Hydrogen elimination during the glow-discharge deposition of a-Si:H alloysApplied Physics Letters, 1981
- Glow discharge preparation of amorphous hydrogenated silicon from higher silanesApplied Physics Letters, 1980
- Infrared and Ultraviolet Spectra of the Products of the Vacuum-Ultraviolet Photolysis of Silane Isolated in an Argon MatrixThe Journal of Chemical Physics, 1970