Scanning ion microscopy and microsectioning of electron beam recrystallized silicon on insulator devices
- 1 November 1988
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B
- Vol. 6 (6) , 1940-1943
- https://doi.org/10.1116/1.584137
Abstract
No abstract availableKeywords
This publication has 0 references indexed in Scilit: