Selective Etching Characteristics of Peroxide/Ammonium‐Hydroxide Solutions for GaAs / Al0.16Ga0.84As
- 1 October 1982
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 129 (10) , 2380-2382
- https://doi.org/10.1149/1.2123532