Characterization of β-SiC surfaces and the Au/SiC interface

• 1 May 1986
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 4  (3) , 1696-1700
• https://doi.org/10.1116/1.573958

Abstract

Keywords

• Β SIC SURFACE
• ETCHED
• TREATMENT
• ANNEALED
• ADSORBED