In situ reactive glow discharge cleaning of x-ray optical surfaces

Publisher Website
Google Scholar
Abstract
We report the first implementation of an in situ glow discharge cleaning procedure for the removal of carbon contamination from x‐ray optical surfaces. In situ cleaning obviates the need for the time‐consuming and costly process of element removal, cleaning or repolishing, remounting, and realignment usually necessary to restore x‐ray optics to their original condition. The apparatus required is quite simple and can easily be fitted to most existing UHV (ultrahigh vacuum) mirror boxes or monochromators. Results with several monochromators at the Brookhaven National Labs National Synchrotron Light Source (NSLS) show that better than original performance can be obtained at the carbon K edge, since the elements are not exposed to atmosphere after in situ cleaning and do not accumulate the adventitious carbon layer associated with more traditional methods. Possible improvements and extensions of the technique are also described.

This publication has 6 references indexed in Scilit: