Electron energy distribution function in a microwave discharge created by propagating surface waves
- 14 February 1994
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 27 (2) , 301-311
- https://doi.org/10.1088/0022-3727/27/2/019
Abstract
The kinetics of plasmas sustained by surface wave propagation at a frequency 2375 MHz in argon gas are studied experimentally. A simple manner for estimating the plasma parameters on the basis of general relations is given. The measured electron energy distribution functions are compared to numerical results from a kinetic modelling of surface wave produced plasma. Good agreement is found. By averaging over the measured electron energy distribution functions, the plasma macroscopic parameters (electron density and temperature, as well as frequencies of different processes initiated by electron impact) are obtained.Keywords
This publication has 25 references indexed in Scilit:
- Analytical expressions for the axial structure of surface wave sustained plasmas under various regimes of charged particle lossPlasma Sources Science and Technology, 1993
- The similarity laws for the maintenance field and the absorbed power per electron in low-pressure surface wave produced plasmas and their extension to HF plasmas in generalPhysica Scripta, 1988
- Slow ionising high-frequency electromagnetic wave along a thin plasma columnJournal of Physics D: Applied Physics, 1984
- Electron energy distributions and excitation rates in high-frequency argon dischargesJournal of Physics D: Applied Physics, 1983
- Modelling of a low-pressure plasma column sustained by a surface waveJournal of Physics D: Applied Physics, 1983
- Theory of a plasma column sustained by a surface waveJournal of Physics D: Applied Physics, 1981
- Axial electron density and wave power distributions along a plasma column sustained by the propagation of a surface microwaveJournal of Applied Physics, 1980
- Comparison of the Methods for Measuring the Energy Distribution Function in PlasmasJapanese Journal of Applied Physics, 1974
- Electron energy distributions in plasmas. IProceedings of the Royal Society of London. Series A. Mathematical and Physical Sciences, 1959
- Der NiedervoltbogenThe European Physical Journal A, 1930