Simulation of multiple etch fronts

• 1 November 1991
• journal article
• Published by Elsevier in Microelectronics Journal
• Vol. 22  (7-8) , 97-104
• https://doi.org/10.1016/0026-2692(91)90018-i

Abstract

Keywords

• MODEL
• ETCH
• ALGORITHMS
• EXHIBIT SWELLING
• STRING
• MTEXT
• MATH
• BEAM
• INTERRELATED