Characterization of TiN, ZrN and HfN films deposited by AIP process.

• 1 January 1990
• journal article
• Published by The Surface Finishing Society of Japan in Journal of The Surface Finishing Society of Japan
• Vol. 41  (5) , 509-513
• https://doi.org/10.4139/sfj.41.509

Abstract

Keywords

• ZRN
• HFN FILMS
• AIP PROCESS
• FILMS DEPOSITED
• CHARACTERIZATION OF TIN